All-sound-point out ultraviolet lasers are already commonly Utilized in the fields of mechanical flaw detection, lithography, micromachining and medication for the benefits of tiny volume, lengthy daily life, substantial effectiveness, great beam high quality, huge tuning and slim spectral line, and many others. Using large energy around-infrared coherent gentle source as the elemental frequency source according to nonlinear tuning technologies, building ultraviolet coherent radiation by multistage frequency conversion is considered an important approach to produce the ultraviolet coherent light supply.
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We summarized the current progress status on the substantial-electrical power DUV laser both within the wavelength of FHG of your 1-μm laser and at 193 nm. The current improvement of your good-point out/fiber laser, in addition to the nonlinear optical crystals, prompts don't just the typical electric power but additionally the beam excellent (coherence) of your DUV lasers to an unprecedented level.
The important thing dilemma of ultraviolet coherent gentle supply primarily focuses on the development of nonlinear optical frequency conversion crystal in ultraviolet band. The nonlinear optical crystal is among the ailments for frequency transformation, so The expansion, dimension, injury resistance, conversion effectiveness and allowable parameter variety of nonlinear optical crystal are expected Increasingly more.
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Moreover, combining the stable-state laser with other nonlinear course of action like stimulated Raman scattering, NIR lasers may very well be attained at new wavelengths with superior electrical power and superior beam quality, which was tested through the evidence-of-basic principle experiment. This Raman laser plan presents a brand new route to the higher-electrical power DUV laser, especially with the wavelength of 193 nm.
The beam profile demonstrated in Figure 7b shown a good beam top quality as among the list of deserves of Raman laser, which might be beneficial to produce a 193-nm DUV laser with a high quality beam.
The conversion effectiveness from fundamental NIR to DUV is from five% to 36% based on the noted brings about Table one. Raising the conversion effectiveness will lessen the load on the look and setup of the basic laser amplifier along with the electric powered electrical power use. An excellent beam quality of the basic laser will likely contribute on the raising of the conversion efficiency and also the right ability depth from the NIR and eco-friendly laser during the SHG and FHG system, respectively. The highest conversion efficiencies from NIR to green and eco-friendly to DUV laser by utilization of CLBO crystal are 70% and around 50%, respectively [twelve], which corresponds to the conversion performance of here 35% from elementary to DUV.
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